Pulse photon processing of a thin-film Si/Mg/Si/Sitall System

Authors

  • D.J Asanov

    Nukus State Pedagogical Institute named after Ajiniyaz image/svg+xml

Keywords: rapid heat treatment (RHT), magnesium silicide, pulsed photonic treatment, heterostructure, Si/Mg/Si/sitall system

Abstract

This is not a sufficient condition for creating silicide-silicon heterojunctions and building new semiconductor devices. Therefore, it is of undoubted interest to develop new methods for the formation of Mg Si films on silicon, in which higher temperatures can be used to improve the crystalline quality of the films. In this work, the rapid heat treatment (RHT) method was used to form magne-

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