PULSE PHOTON PROCESSING OF A THIN-FILM Si/Mg/Si/Sitall System

Avtorlar

  • Asanov D.J.

    Nukus State Pedagogical Institute named after Ajiniyaz image/svg+xml

Gilt sózler: tez issiqlik bilan ishlov berish (TIB), magniy silicidi, impulsli fotonik ishlov berish, geterostruktura, Si/Mg/Si/sitall tizimi

Annotaciya

Bu silicid-kremniy getero-birikmalarini yaratish va yangi yarimo'tkazgich qurilmalarini qurish uchun etarli shart emas. Shu sababli, kremniyda Mg2Si plyonkalarini hosil qilishning yangi usullarini ishlab chiqish shubhasiz qiziqish uyg'otadi, bunda plyonkalarning kristallik sifatini yaxshilash uchun yuqori haroratlardan foydalanish mumkin. Ushbu ishda magniy silisidini hosil qilish uchun tezkor issiqlik bilan ishlov berish (TIB) usuli qo'llanildi. Buning asosida magniy silisidini sintez qilish uchun optimal haroratlar va impuls davomiyligi aniqlanadi.

Paydalanılǵan ádebiyatlar

1. Rapid-thermal annealing and plasma treatment for the formation of transition metal nitrides and silicides/ M.I. Markevich, A.N.Malyshko, A.M.Chaplanov E.N.Scherbakova//Proceedings of Science and Technological Seminar Korea-Belarus.- Minsk: 27 June 2011. - P.63

2. Formation of thin-film systems based on transition metal silicides by the BTO method / M.I. Markevich, A.M. Chaplanov, E.N. Shcherbakova. // Instrumentation-2011: Proceedings of the 4th International Scientific and Technical Conference - Minsk, November 16-18, 2011 - P.367-368.

3. Comparative analysis of stationary and pulsed methods for the formation of transition metal silicides / M.I. Markevich, A.M. Chaplanov, E.N. Shcherbakova. // Science - education, production, economics Materials of the 9th international scientific and technical conference. – Minsk: 2011 - V.2. - P.187.

4. Formation of thin films of nitrides and silicides of transition metals for micro- and nanoelectronics / M.I. Markevich, A.N.Malyshko, A.M.Chaplanov, E.N.Scherbakova// Innovations in Science and Technology: Proceedings of Belarus –Korea Science and Technological Forum. Minsk, 25-26 June 2012. - P.42-43.

5. Structural and phase transformations in thin-film Si-Mg-Si systems during stationary annealing /A.N. Malyshko, A.M. Chaplanov, E.N. Shcherbakova. Modern methods and technologies for the creation and processing of materials: Collection of materials of the VII Intern. scientific and technical conf. Minsk, September 19-21, 2012. Book 2. - P.363-369.

6. Influence of pulsed photon annealing on the structure and phase composition of thin-film systems based on silicon and transition metals / M.I.Markevich, A.M.Chaplanov, E.N.Shcherbakova. // Science and technology. 2013. № 2. - P. 63-66.